Dynamic Response Analysis of an Immersed Electrothermally Actuated MEMS Mirror

MEMS mirrors have a wide range of applications, most which require large field-of-view (FOV). Immersing in liquid is an effective way to improve the FOV. However, increased viscosity, convective heat transfer and thermal conductivity greatly affect dynamic behaviors electrothermally actuated micromirrors. In this paper, complex interactions among multiple energy domains, including electrical, thermal, mechanical fluidic, are studied immersed mirror. A damping model mirror built dimensional analysis applied reduce number variables thus significantly simplify model. The solution fluid solved by using regression analysis. response can be calculated easily experimental results verify effectiveness accuracy these models. difference between prediction measurement within 4%. FOV scanned also factor 1.6. developed work study various actuators.